The rtp 2001 covered the latest developments in rtp and other short time processing continuously aiming to point out the future direction in the silicon ulsi devices and ii vi iii v compound semiconductor devices this book covers the following areas advanced mos gate stack integration technologies advancd channel engineering including shallow junction sige hetero structure novel . Rapid thermal processing for future semiconductor devices proceedings of the 2001 international conference on rapid thermal processing for future ise shima mie japan november 14 16 2001 fukuda hisashi isbn 9780444513397 kostenloser versand fur alle bucher mit versand und verkauf duch amazon. Purchase rapid thermal processing for future semiconductor devices 1st edition print book e book isbn 9780444513397 9780080540269. Rapid thermal processing for future semiconductor devices h fukuda this volume is a collection of papers which were presented at the 2001 international conference on rapid thermal processing rtp 2001 held at ise shima mie on november 14 16 2001
How it works:
1. Register Trial Account.
2. Download The Books as you like ( Personal use )